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Measurement specifications

Gas calibration included

Nitrogen (N2), Air

Maximum working measurement line pressure

600 kPa (87 psi) absolute

Measurement range

<1sccm to 50 slm, depending on model. Flow ranges depend on test gas. Ranged indicated for N2 and Air.

型號(hào)

描述

5141-100

molbox RFM, molbloc 5E1-L 10 to 100 sccm

Included:

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E1-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-1K

molbox RFM, molbloc 5E2-L 100 to 1,000 sccm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-10K

molbox RFM, molbloc 5E3-L 1 to 10 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E3-L laminar flow element

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-50K

molbox RFM, molbloc 3E4-L 5 to 50 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 3E4-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-1K

molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-10K

molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E3-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-50K

molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 3E4-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5144-50K

molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm

Included:

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L and 3E4-L laminar flow elements

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male